On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency

TL;DR

This paper presents a universal on-chip transduction scheme that enhances actuation efficiency for MEMS/NEMS resonators, overcoming common challenges like dissipation and integration issues.

Contribution

The authors introduce a novel, adaptable on-chip transduction method applicable to any MEMS/NEMS resonator, enabling fully electrical and integrated actuation.

Findings

Achieved universal on-chip transduction scheme

Enhanced actuation efficiency for various resonators

Overcame material and integration limitations

Abstract

The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor integrability. We show a universal on-chip transduction scheme, which can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip MEMS/NEMS for any resonator.