Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

TL;DR

This paper presents a novel femtosecond laser-assisted method to fabricate high-Q lithium niobate double-disk microcavities with scalable production potential.

Contribution

The authors introduce a femtosecond laser-assisted ion beam milling technique for creating high-quality lithium niobate double-disk whispering-gallery microcavities.

Findings

Achieved optical quality factor of 1.2×10^5

Fabricated two vertically stacked 30-um-diameter disks with 200-nm gap

Method scalable for multiple disks on a single chip

Abstract

We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.