Phase sensitive imaging of 10 GHz vibrations in an AlN microdisk resonator

TL;DR

This paper presents a high-frequency phase-sensitive heterodyne vibrometer capable of mapping amplitude and phase of vibrations up to 10 GHz in an AlN microdisk resonator, enabling detailed mode analysis with high sensitivity.

Contribution

The development of a 10 GHz phase-sensitive heterodyne vibrometer for detailed amplitude and phase mapping of high-frequency vibrations in microresonators is introduced.

Findings

Achieved displacement sensitivity of 0.36 picometers.

Successfully mapped multiple vibrational modes with phase and amplitude.

Results align with numerical simulations.

Abstract

We demonstrate a high frequency phase-sensitive heterodyne vibrometer, operating up to 10 GHz. Using this heterodyne vibrometer, the amplitude and phase fields of the fundamental thickness mode, the radial fundamental and the 2nd-order modes of an AlN optomechanical microdisk resonator are mapped with a displacement sensitivity of around 0.36 picometer at 1 Hz resolution bandwidth. The simultaneous amplitude and phase measurement allows precise mode identification and characterization. The recorded modal frequencies and proles are consistent with numerical simulations. This vibrometer will be of great significance for the development of high frequency mechanical devices.