Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica
R. Beuton, B. Chimier, J. Breil, D. H\'ebert, K. Mishchik, J. Lopez,, P. H. Maire, G. Duchateau

TL;DR
This paper presents a numerical simulation method for modeling the formation and interaction of multiple cavities in fused silica caused by femtosecond laser pulses, incorporating thermo-elasto-plastic material responses.
Contribution
The study introduces a developed numerical tool that simulates laser-induced cavity formation considering thermo-elasto-plastic effects, enabling better control of laser structuring processes.
Findings
Cavity shapes depend on laser energy configuration.
Shock waves influence cavity formation and crack development.
The numerical tool can aid in designing precise laser-induced structures.
Abstract
The formation and the interaction of multiple cavities, induced by tightly focused femtosecond laser pulses, are studied by using a developed numerical tool, including the thermo-elasto-plastic material response. Simulations are performed in fused silica in cases of one, two, and four spots of laser energy deposition. The relaxation of the heated matter, launching shock waves in the surrounding cold material, leads to cavity formation and emergence of areas where cracks may be induced. Results show that the laser-induced structure shape depends on the energy deposition configuration and demonstrate the potential of the used numerical tool to obtain the desired designed structure or technological process.
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