Micromechanical microphone using sideband modulation of nonlinear resonators

TL;DR

This paper demonstrates a micromechanical microphone that uses sideband modulation of nonlinear resonators for sensitive audio detection, suitable for applications like consumer electronics and hearing aids.

Contribution

It introduces a novel micromechanical microphone design utilizing sideband modulation of nonlinear resonators for improved audio sensitivity.

Findings

Detects audio signals at ambient noise levels

Achieves sensitivity of 23.9 μV/Pa

Reliable operation in practical environments

Abstract

We report the successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270$\times$96-$\mu$m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 $\mu$V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids.