Laboratory demonstration of a cryogenic deformable mirror for wavefront correction of space-borne infrared telescopes
Aoi Takahashi, Keigo Enya, Kanae Haze, Hirokazu Kataza, Takayuki, Kotani, Hideo Matsuhara, Tomohiro Kamiya, Tomoyasu Yamamuro, Paul Bierden,, Steven Cornelissen, Charlie Lam, Michael Feinberg

TL;DR
This paper presents a cryogenic deformable mirror with 1,020 actuators, demonstrating its operation at cryogenic temperatures and its potential to improve wavefront correction in space-borne infrared telescopes.
Contribution
We developed and experimentally validated a MEMS-based cryogenic deformable mirror suitable for space telescopes, with high repeatability and no hysteresis, enabling effective wavefront correction.
Findings
Successful operation at 5 K to 295 K temperatures.
High repeatability of a few nm RMS in deformation.
Simulated PSF improvement with wavefront correction.
Abstract
This paper demonstrates a cryogenic deformable mirror (DM) with 1,020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error of their mirror surface, which makes the imaging performance worse. For on-orbit wavefront correction as one solution, we developed a MEMS-processed electro-static DM with a special surrounding structure for use under the cryogenic temperature. We conducted a laboratory demonstration of its operation in three cooling cycles between 5 K and 295 K. Using a laser interferometer, we detected the deformation corresponding to the applied voltages under the cryogenic temperature for the first time. The relationship between voltages and displacements was qualitatively expressed by the quadratic function, which is assumed based on the principle of…
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