Theoretical analysis of electrostatic energy harvester configured as Bennet's doubler based on Q-V cycles

TL;DR

This paper provides a theoretical analysis of a MEMS electrostatic energy harvester configured as Bennet's doubler, deriving the saturation voltage considering electromechanical coupling and verifying results with circuit simulations.

Contribution

It introduces the first analytical solution for saturation voltage in Bennet's doubler-based energy harvesters, accounting for electromechanical effects.

Findings

Analytical saturation voltage derived considering electromechanical coupling

Simulation results verify theoretical predictions for idealized and Schottky diodes

Development insights for circuits to increase saturation voltage

Abstract

This paper presents theoretical analysis of a MEMS electrostatic energy harvester configured as the Bennet's doubler. Steady-state operation of the doubler circuit can be approximated by a right-angled trapezoid Q-V cycle. A similarity between voltage doubler and resistive-based charge-pump circuit is highlighted. By taking electromechanical coupling into account, the analytical solution of the saturation voltage is the first time derived, providing a greater comprehension of the system performance and multi-parameter effects. The theoretical approach is verified by results of circuit simulation for two cases of mathematically idealized diode and of Schottky diode. Development of the doubler/multiplier circuits that can further increase the saturation voltage is investigated.