Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging

TL;DR

This paper demonstrates that grating-based X-ray phase-contrast imaging effectively detects imperfections in gratings and similar products, offering a fast, nondestructive testing method using conventional X-ray sources.

Contribution

It introduces a practical application of X-ray phase-contrast imaging for nondestructive testing of grating imperfections with clear experimental validation.

Findings

Electroplating flaws are detectable by absorption signals.

Grating defects from UV exposure are distinguishable with phase-contrast signals.

The method is compatible with low-brilliance X-ray sources and offers a large field of view.

Abstract

We reported the usage of grating-based X-ray phase-contrast imaging in nondestructive testing of grating imperfections. It was found that electroplating flaws could be easily detected by conventional absorption signal, and in particular, we observed that the grating defects resulting from uneven ultraviolet exposure could be clearly discriminated with phase-contrast signal. The experimental results demonstrate that grating-based X-ray phase-contrast imaging, with a conventional low-brilliance X-ray source, a large field of view and a reasonable compact setup, which simultaneously yields phase- and attenuation-contrast signal of the sample, can be ready-to-use in fast nondestructive testing of various imperfections in gratings and other similar photoetching products.