Realizing the insulator-to-metal transition in Se-hyperdoped Si via non-equilibrium material processing
F. Liu, S. Prucnal, Y. Berenc\'en, Z. Zhang, Y. Yuan, Y. Liu, R., Heller, R. Boettger, L. Rebohle, W. Skorupa, M. Helm, S. Zhou

TL;DR
This study demonstrates an insulator-to-metal transition in selenium-hyperdoped silicon achieved through non-equilibrium processing, revealing increased conductivity and carrier concentration linked to the formation of an intermediate band.
Contribution
It introduces a method to induce the insulator-to-metal transition in Se-hyperdoped Si using ion implantation and flash lamp annealing, highlighting the role of an intermediate band.
Findings
Carrier concentration and conductivity increase with Se doping
Variable-range hopping with Coulomb gap observed below Mott limit
Insulator-to-metal transition linked to intermediate band formation
Abstract
We report on the insulator-to-metal transition in Se-hyperdoped Si layers driven by manipulating the Se concentration via non-equilibrium material processing, i.e. ion implantation followed by millisecond-flash lamp annealing. Electrical transport measurements reveal an increase of carrier concentration and conductivity with increasing Se concentration. For the semi-insulating sample with Se concentrations below the Mott limit, quantitative analysis of the temperature dependence of conductivity indicates a variable-range hopping mechanism with an exponent of s = 1/2 rather than 1/4, which implies a Coulomb gap at the Fermi level. The observed insulator-to-metal transition is attributed to the formation of an intermediate band in the Se-hyperdoped Si layers.
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