# Optical Characteristics for Inductively RF Discharge and Post-Discharge of Pure Neon at Low Pressure

## TL;DR

This study investigates the optical emission characteristics of pure neon plasma under inductively RF discharge and post-discharge conditions at low pressures, using optical emission spectroscopy to analyze spectral features and electron temperature.

## Contribution

It introduces a new reactor design for inductively RF neon plasma and compares electron temperature measurements obtained by two methods at low pressures.

## Key findings

- Maximum atomic emission intensity at 0.77mbar pressure.
- Identification of key neon spectral lines at 585.248nm and 724.516nm.
- Spectral analysis conducted over 200-1200nm range.

## Abstract

Electron temperature for inductively RF post-discharge of pure neon (Ne) with a newly reactor design was presented in comparison for two different methods. Optical emission spectroscopy (OES) was applied for characterizations of inductively RF Ne plasma at pressures between 0.17mbar and 1.4mbar for newly reactor type. Discharge and post-discharge were generated with an RF power supply at a frequency of 13.56MHz and output powers of 100, 160 and 200W. Spectra were evaluated in the range 200-1200nm by an optical spectrometer. At low pressure, the main spectral features reported were the wavelengths of the atomic Ne transitions at 585.248nm and 724.516nm. The atomic emission intensities showed a maximum in inductive system when the pressure was about 0.77mbar.

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Source: https://tomesphere.com/paper/1706.05015