Dual-optical-comb spectroscopic ellipsometry

TL;DR

This paper introduces dual-optical-comb spectroscopic ellipsometry (DCSE), a novel technique that achieves ultra-high spectral precision and stability in ellipsometric measurements by combining Fourier transform spectroscopy with optical combs.

Contribution

The study presents a new spectroscopic ellipsometry method using dual optical combs that improves spectral accuracy and resolution without mechanical movement or polarization modulation.

Findings

Achieved spectral resolution up to 1.2×10⁻⁵ nm.

Demonstrated stable measurements across 5-10 THz bandwidth.

Enhanced robustness by eliminating polarization modulation.

Abstract

Spectroscopic ellipsometry is a means to investigate optical and dielectric material responses. Conventional spectroscopic ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb spectroscopic ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.