Biosensing using Functionally Graded Piezoelectric MEMS Resonators

TL;DR

This paper investigates the nonlinear dynamics of piezoelectric MEMS resonators, demonstrating how axial force tuning affects resonance behavior and stability, with implications for precise control in sensing applications.

Contribution

It introduces a novel analysis of nonlinear dynamics in piezoelectric MEMS resonators, including derivation of equations and stability analysis of periodic solutions.

Findings

Higher amplitude periodic orbits have smaller basins of attraction.

Piezoelectric actuation effectively shifts the primary resonance.

Stability of periodic solutions depends on amplitude and damping.

Abstract

Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to shift the primary resonance of the micro-resonator. The governing equation of motion is derived by minimization of the Hamiltonian and generalized to the viscously damped systems. The periodic solutions in the vicinity of the primary resonance are detected and their stability is investigated. The basins of attraction conforming to three individual periodic orbits are determined. The outcomes show that the higher the amplitude of the periodic orbit, the smaller is the area of the attractor.