Intermolecular Interactions in Radial-Contour Mode Microring Resonators

TL;DR

This paper investigates how intermolecular forces like van der Waals and Casimir affect the dynamics of electrostatically actuated radial-contour microring resonators, providing insights for designing advanced MEMS devices.

Contribution

It introduces a comprehensive dynamic model including intermolecular forces and viscous damping, and analyzes their effects on resonator behavior for the first time.

Findings

Intermolecular forces significantly influence natural frequencies.

Design parameters like radius and voltage affect dynamic responses.

Model aids in designing MEMS resonators and RF filters.

Abstract

This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping effect. The Galerkin method is used to discretize the distributed-parameter model of the considered ring resonator. The influences of intermolecular forces such as van der Waals and Casimir on the dynamic behavior of the resonator are investigated. The natural frequencies and mode shapes of the ring are calculated for various values of ratio of radii (\b{eta}). The effect of the design parameters including ring radius, electrostatic voltage and quality factor on the dynamic responses, is discussed. The results of present study can be used in the design of novel MEMS resonators, RF filters and channelizers.