Striations in electronegative capacitively coupled radio-frequency plasmas: effects of the pressure, voltage, and electrode gap

TL;DR

This study investigates how pressure, voltage, and electrode gap influence striations in electronegative CCRF CF_4 plasmas, combining experimental spectroscopy and simulations to understand the conditions leading to self-organized plasma structures.

Contribution

It provides a detailed analysis of the effects of external parameters on plasma striations, including a phase diagram for transition conditions, using combined experimental and simulation approaches.

Findings

Striation gap inversely proportional to pressure.

Ion density maxima increase with pressure and voltage.

Transition between striated and non-striated modes depends on pressure and voltage.

Abstract

Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely composed of CF_3^+ and F^- ions) resonates with the excitation frequency. In this work we explore the effects of the gas pressure, the RF voltage, and the electrode gap on this striated structure by Phase Resolved Optical Emission Spectroscopy and Particle-In-Cell/Monte Carlo Collisions simulations. The measured electronic excitation patterns at different external parameters show a good general agreement with the spatio-temporal plots of the ionization rate obtained from the simulations. For a fixed driving frequency the minima of the CF_3^+ and F^- ion densities (between the density peaks in the bulk) are comparable and independent of other external parameters. However, the ion density maxima generally increase as a function of the pressure or RF voltage, leading to the enhanced spatial modulation of plasma parameters. The striation gap (defined as the distance between two ion density peaks) is approximately inversely proportional to the pressure, while it exhibits a weak dependence on the RF voltage and the electrode gap. A transition between the striated and non-striated modes can be observed by changing either the pressure or the RF voltage; for 13.56 MHz and 18 MHz driving frequencies we present a phase diagram as a function of the pressure and voltage amplitude parameters.