# Systematic efficiency study of line-doubled zone plates

## TL;DR

This paper investigates the efficiency of line-doubled zone plates, focusing on their fabrication process involving high aspect ratio HSQ templates and Ir coating for high-resolution x-ray imaging.

## Contribution

It provides a systematic study of the fabrication and efficiency of line-doubled zone plates using electron-beam lithography and atomic layer deposition.

## Key findings

- High aspect ratio HSQ templates enable nanoscale zone plate fabrication
- Atomic layer deposition of Ir improves zone plate performance
- Efficiency metrics for line-doubled zone plates are characterized

## Abstract

Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).

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Source: https://tomesphere.com/paper/1705.02807