# Rectangular Photonic Crystal Nanobeam Cavities in Bulk Diamond

## TL;DR

This paper reports the fabrication and characterization of rectangular photonic crystal nanobeam cavities in bulk diamond, achieving high quality factors and promising applications in quantum photonics.

## Contribution

The work introduces a new fabrication method for rectangular nanobeam cavities in bulk diamond with high yield and deterministic resonance control.

## Key findings

- Simulated Q factors exceed 1 million.
- Measured resonances have Q factors over 14,000.
- High cavity yield across the diamond chip.

## Abstract

We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality factor (Q) of over 1 million. Measured cavity resonances show fundamental modes with spectrometer-limited quality factors larger than 14,000 within 1nm of the NV center's zero phonon line at 637nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.