Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method

TL;DR

This paper introduces the correlogram correlation method for surface topography evaluation in white light interferometry, demonstrating through analysis and simulations that it outperforms existing algorithms in accuracy under uncorrelated noise conditions.

Contribution

The paper presents a novel correlogram correlation method and proves its superior accuracy compared to existing evaluation algorithms in white light interferometry.

Findings

Correlogram correlation method is most accurate among evaluated algorithms.

The method outperforms envelope and phase methods in simulations.

Theoretical and numerical analysis confirm its robustness against uncorrelated noise.

Abstract

In this paper we promote a method for the evaluation of a surface topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of uncorrelated noise. Examples illustrate the superiority of the correlogram correlation method over the common envelope and phase methods.