Infrared properties of micromachined vanadium oxide thin films

TL;DR

This paper explores the synthesis and fabrication of vanadium oxide thin films via vacuum evaporation and sputtering, focusing on their potential use in optical coatings and instrumentation.

Contribution

It introduces new methods for producing vanadium oxide films and evaluates their application in optical devices.

Findings

Successful fabrication of vanadium dioxide films using two methods

Potential applications in optical coatings and instrumentation

Discussion of synthesis and pressing techniques

Abstract

This paper discusses questions of synthesizing and pressing vanadium oxides to create film-forming materials that can be used in producing optical coatings. Based on the film-forming materials thus created, technological processes have been developed for fabricating coatings from vanadium dioxide by two methods of producing thin films: vacuum evaporation and magnetron sputtering. Questions of using films made from vanadium oxide in optical instrumentation are considered.