# Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

## TL;DR

This paper demonstrates a MEMS resonator with tunable frequencies achieved through localized Joule heating of VO2, enabling programmable mechanical states by exploiting phase transitions and internal stress control.

## Contribution

It introduces a novel MEMS device that uses phase change materials for programmable mechanical resonance tuning via localized heating.

## Key findings

- Multiple eigenfrequency states can be programmed.
- Phase coexistence in VO2 enables tuning of mechanical properties.
- The approach opens new avenues for configurable nanostructure arrays.

## Abstract

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.