One-dimensional Modelling of Electrostatic Generation and Detection of Bulk Acoustic Waves in layered structures

TL;DR

This paper presents a one-dimensional model for electrostatic generation and detection of bulk acoustic waves in layered structures, focusing on silicon resonators with capacitive transducers for RF-MEMS applications.

Contribution

It introduces a unidimensional analysis integrating capacitive transduction within impedance methods for modeling layered RF-MEMS resonators.

Findings

Effective modeling of thickness-extensional mode vibrations

Integration of capacitive transducers in impedance analysis

Potential for improved RF-MEMS device design

Abstract

This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic waves established along the thickness of a layered structure. The analysis consists of integrating the capacitive transduction of longitudinal elastic waves within a specific implementation of the general scheme of impedance methods largely used as standard tools for the modelling of RF-MEMS.