SU-8 clamped CVD graphene drum resonators

TL;DR

This paper presents the fabrication and electrical characterization of SU-8 polymer-clamped CVD graphene drum resonators, demonstrating improved yield, cleaner spectra, and high strain, advancing graphene NEMS for sensing and signal processing.

Contribution

It introduces a novel clamping method using SU-8 polymer for CVD graphene resonators, enhancing device performance and enabling strain engineering.

Findings

Increased device yield and responsivity.

Cleaner resonance spectra with eliminated edge modes.

High strain levels indicating potential for performance optimization.

Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, this resonator is highly strained, indicating its potential in strain engineering for performance enhancement.