Release-free silicon-on-insulator cavity optomechanics

TL;DR

This paper presents a novel silicon-on-insulator nanomechanical resonator system that integrates optical control and readout, enabling scalable co-integration of signal transduction and processing in a single platform.

Contribution

Introduction of a release-free silicon-on-insulator cavity optomechanical device with engineered localized resonances for integrated photonic and phononic functionalities.

Findings

Demonstrated optical coupling to nanomechanical resonators

Controlled mechanical wave dispersion using silicon fin waveguides

Achieved localized laser light and mechanical motion readout via radiation pressure

Abstract

We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and processing capabilities via electronic, photonic, and phononic degrees freedom in a single scalable platform.