Angular factor corrections in thin film x-ray diffraction

TL;DR

This paper revises angular correction methods in thin film X-ray diffraction, correcting misconceptions about absorption factors and introducing a new linear regime for very thin films, enhancing accuracy in diffraction analysis.

Contribution

It develops correct absorption correction expressions for thin films and introduces a linear regime concept, improving analysis accuracy over existing methods.

Findings

Corrected absorption correction expressions for thin films.

Identified a linear regime where absorption effects are negligible.

Improved accuracy in thin film X-ray diffraction analysis.

Abstract

The current practice of angular (Lorentz, Polarization and absorption (LPA)) corrections in bulk materials for higher angle broad peaks, due to the K{\alpha} doublet, are based on the results of Pike (Acta Cryst., 12 (1959) 87-92) and Ladell (Acta Cryst. 14 (1961) 47-53). These results are extended to thin film x-ray diffraction. The current practice in thin film studies of using the absorption factors for monochromatic radiation in LPA corrections is incorrect in both symmetric and grazing incidence x-ray diffraction. The correct expressions for absorption corrections are developed. In addition, a new length scale, the linear regime, is shown to exist for very thin films where the absorption factor and the integrated intensity are independent of the absorption coefficient. For very thin films, it is practically advantageous to use the expressions for the linear regime over those for the thin film regime. The procedures to obtain both the main results are of general validity and can be extended to several thin film diffraction techniques.