Thin Film growth of Solid State materials

TL;DR

This paper discusses the use of magnetron sputtering for thin film deposition, modeling epitaxial growth of YSZ, and presents experimental results on Cu and SiCN thin films with various growth characteristics.

Contribution

It provides a modeling study of adatom diffusion during YSZ epitaxial growth and reports experimental deposition of Cu and SiCN thin films with unique morphologies.

Findings

Modeling of adatom diffusion in YSZ growth

Successful deposition of Cu thin films on Si

Observation of dendritic growth in SiCN nanocomposite films

Abstract

Magnetron sputtering has also been used to deposit thin films of some materials and it has significant technological importance. A modeling on deposition of epitaxial thin films of Yttrium Stabilized Zirconia (YSZ) was done the diffusion of adatom on the surface were studies. There exists a strong interaction of ions formed in the plasma during the sputtering process. Cu thin films were deposited on Si. Nanocomposite thin film of SiCN showed dendritic growth.