Numerical Modeling of MEMS Resonators
Hamid T. Chorsi, Meysam T. Chorsi, and Stephen D. Gedney
TL;DR
This paper develops an analytical model to describe the dynamic behavior of RF MEMS disk resonators, which are crucial for frequency selection in various technological applications.
Contribution
It introduces a new analytical approach for modeling the dynamics of MEMS resonators, enhancing understanding and design capabilities.
Findings
Successful formulation of the dynamic behavior using analytical methods
Potential for improved design of MEMS resonators based on the model
Foundation for further analytical and experimental studies
Abstract
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Acoustic Wave Resonator Technologies