Anisotropic Dielectric Breakdown Strength of Single Crystal Hexagonal Boron Nitride
Yoshiaki Hattori, Takashi Taniguchi, Kenji Watanabe, Kosuke, Nagashio

TL;DR
This study measures the anisotropic dielectric breakdown strength of single crystal hexagonal boron nitride (h-BN), revealing directional differences and establishing a standard for quality assessment in electronic applications.
Contribution
It provides the first detailed measurement of anisotropic dielectric breakdown strength in h-BN, highlighting its directional dependence and implications for device reliability.
Findings
EBD+c = 3 MV/cm, EBD//c = 12 MV/cm
EBD//c for h-BN exceeds that of diamond
High-quality bulk h-BN sets a standard for CVD-grown layers
Abstract
Dielectric breakdown has historically been of great interest from the perspectives of fundamental physics and electrical reliability. However, to date, the anisotropy in the dielectric breakdown has not been discussed. Here, we report an anisotropic dielectric breakdown strength (EBD) for h-BN, which is used as an ideal substrate for two-dimensional (2D) material devices. Under a well-controlled relative humidity, EBD values in the directions both normal and parallel to the c axis (EBD+c & EBD//c) were measured to be 3 and 12 MV/cm, respectively. When the crystal structure is changed from sp3 of cubic-BN (c-BN) to sp2 of h-BN, EBD+c for h-BN becomes smaller than that for c-BN, while EBD//c for h-BN drastically increases. Therefore, h-BN can possess a relatively high EBD concentrated only in the direction parallel to the c axis by conceding a weak bonding direction in the highly…
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Taxonomy
TopicsSemiconductor materials and devices · Graphene research and applications · Diamond and Carbon-based Materials Research
