Carbon cluster diagnostics-I: Direct Recoil Spectroscopy (DRS) of Ar+ and Kr+ bombarded graphite
Shoaib Ahmad, M.N. Akhtar, A. Qayyum, B. Ahmad, K. Bahar, W. Arshed

TL;DR
This study investigates the energy spectra of multiply charged carbon ions recoiling from graphite when bombarded with argon and krypton ions at specific energies, revealing sharp direct recoil peaks and ion charge states.
Contribution
It provides detailed measurements of multiply charged carbon ions recoiling from graphite under ion bombardment, highlighting the observation of sharp DR peaks for various charge states.
Findings
Observation of sharp DR peaks for singly to sextuply charged carbon ions
Detection of characteristic recoil energies for different charge states
Use of collimation techniques to reduce background noise
Abstract
Measurements of the energy spectra of multiply charged positive and negative carbon ions recoiling from graphite surface under 100 and 150 keV argon and krypton ion bombardment are presented. With the energy spectrometer set at recoil angle of 79.5 degrees, direct recoil (DR) peaks have been observed with singly as well as multiply charged carbon ions , where n = 1 to 6. These monatomic and cluster ions have been observed recoiling with the characteristic recoil energy E(DR) . We have observed sharp DR peaks. A collimated projectile beam with small divergence is supplemented with a similar collimation before the energy analyzer to reduce the background of sputtered ions due to scattered projectiles.
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Taxonomy
TopicsIon-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
