High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

TL;DR

This paper presents a method for high-throughput 3D microstructure fabrication in glass, achieving isotropic spatial resolution of approximately 100 microns by combining low-NA focusing with spatial temporal focusing.

Contribution

It introduces a novel approach that maintains isotropic resolution in 3D glass microfabrication using spatial temporal focusing with low-NA lenses.

Findings

Achieved isotropic spatial resolution of ~100 microns.

Enabled high-throughput fabrication in glass.

Demonstrated effective resolution despite low-NA focusing.

Abstract

We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 micron.