Large-scale quantum-emitter arrays in atomically thin semiconductors

TL;DR

This paper presents a scalable method to create large arrays of high-quality, deterministic quantum emitters in atomically thin semiconductors, advancing the development of integrated quantum photonic devices.

Contribution

A novel nanopatterned substrate technique for scalable, deterministic placement of quantum emitters in 2D materials with high yield and spectral stability.

Findings

Arrays with hundreds of quantum emitters created

Spectral wanderings reduced to 0.1 meV

High QE yield approaching unity

Abstract

The flourishing field of two-dimensional (2D) nanophotonics has generated much excitement in the quantum technologies community after the identification of quantum emitters (QEs) in layered materials (LMs). LMs offer many advantages as platforms for quantum circuits, such as integration within hybrid technologies, valley degree of freedom and strong spin-orbit coupling. QEs in LMs, however, suffer from uncontrolled occurrences, added to the uncertainty over their origin, which has been linked to defects and strain gradients. Here, we report a scalable method to create arrays of single-photon emitting QEs in tungsten diselenide (WSe2) and tungsten disulphide (WS2) using a nanopatterned silica substrate. We obtain devices with QE numbers in the range of hundreds, limited only by the flake size, and a QE yield approaching unity. The overall quality of these deterministic QEs surpasses that of their randomly appearing counterparts, with spectral wanderings of around 0.1 meV, an order of magnitude lower than previous reports. Our technique solves the scalability challenge for LM-based quantum photonic devices.