Finite element analysis of ion-implanted diamond surface swelling

TL;DR

This study combines experimental measurements and finite element simulations to analyze surface swelling in diamond caused by buried graphite-like inclusions from MeV ion implantation, providing insights into damage mechanisms.

Contribution

The paper introduces a comprehensive finite element model that accounts for variable mechanical properties during ion implantation in diamond, validated by experimental data.

Findings

Numerical predictions match experimental swelling measurements.

Surface deformation profiles and stress distributions are accurately modeled.

Insights into damage mechanisms in diamond from different ion types and energies.

Abstract

We present experimental results and numerical Finite Element analysis to describe surface swelling due to the creation of buried graphite-like inclusions in diamond substrates subjected to MeV ion implantation. Numerical predictions are compared to experimental data for MeV proton and helium implantations, performed with scanning ion microbeams. Swelling values are measured with white light interferometric profilometry in both cases. Simulations are based on a model which accounts for the through-the-thickness variation of mechanical parameters in the material, as a function of ion type, fluence and energy. Surface deformation profiles and internal stress distributions are analyzed and numerical results are seen to adequately fit experimental data. Results allow us to draw conclusions on structural damage mechanisms in diamond for different MeV ion implantations.