Effects of high-power laser irradiation on sub-superficial graphitic layers in single crystal diamond

TL;DR

This study investigates how high-power laser pulses modify sub-surface graphitic layers in single-crystal diamond, showing that laser irradiation can significantly thicken these layers without damaging the surrounding crystal, enabling precise diamond structuring.

Contribution

It provides a systematic analysis of laser-induced modifications in diamond's graphitic layers, demonstrating controlled thickening and structural tuning for advanced fabrication.

Findings

Laser irradiation increases graphitic layer thickness six-fold.

Optimal parameters prevent mechanical failure of the diamond.

Detailed internal structure analysis reveals nano graphitic and amorphous layers.

Abstract

We report on the structural modifications induced by a lambda = 532 nm ns-pulsed high-power laser on sub-superficial graphitic layers in single-crystal diamond realized by means of MeV ion implantation. A systematic characterization of the structures obtained under different laser irradiation conditions (power density, number of pulses) and subsequent thermal annealing was performed by different electron microscopy techniques. The main feature observed after laser irradiation is the thickening of the pre-existing graphitic layer. Cross sectional SEM imaging was performed to directly measure the thickness of the modified layers, and subsequent selective etching of the buried layers was employed to both assess their graphitic nature and enhance the SEM imaging contrast. In particular, it was found that for optimal irradiation parameters the laser processing induces a six-fold increase the thickness of sub superficial graphitic layers without inducing mechanical failures in the surrounding crystal. TEM microscopy and EELS spectroscopy allowed a detailed analysis of the internal structure of the laser irradiated layers, highlighting the presence of different nano graphitic and amorphous layers. The obtained results demonstrate the effectiveness and versatility of high-power laser irradiation for an accurate tuning of the geometrical and structural features of graphitic structures embedded in single crystal diamond, and open new opportunities in diamond fabrication.