Superconducting detector of IR single-photons based on thin WSi films
V.A. Seleznev, A. Divochiy, Yu.B. Vakhtomin, P.V. Morozov, P.I., Zolotov, D.D.Vasilev, K. M. Moiseev, E. I. Malevannaya, K. V. Smirnov

TL;DR
This paper reports the development of WSi thin-film superconducting single-photon detectors with high efficiency, low dark counts, and improved absorption using cavity structures, demonstrating their potential for IR photon detection.
Contribution
The paper introduces a new fabrication process for high-quality WSi films and demonstrates enhanced detector performance with cavity structures for IR single-photon detection.
Findings
System detection efficiency reaches ~30% at 1550 nm
Cavity structures increase quantum efficiency to >65%
Dark count rate limited to 1 s^-1
Abstract
We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7K ) which certifies high quality and homogeneity of the films created. The first experiments on creating superconducting single-photon detectors showed that the detectors SDE (system detection efficiency) with increasing bias current (Ib) reaches a constant value of ~30% (for 1550 nm) defined by infrared radiation absorption by the superconducting structure. To enhance radiation absorption by the superconductor there were created detectors with cavity structures which demonstrated a practically constant…
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