Towards carbon nanotube growth into superconducting microwave resonator geometries

TL;DR

This paper demonstrates the successful integration of carbon nanotube growth into superconducting microwave resonator geometries by using molybdenum-rhenium coplanar waveguides that withstand CVD conditions, enabling advanced quantum device fabrication.

Contribution

It introduces a method to incorporate nanotube growth into superconducting resonators using MoRe materials that survive CVD, expanding possibilities for quantum and nanoelectronic devices.

Findings

MoRe resonators maintain high-Q resonances after CVD

Comparison shows MoRe devices outperform niobium after CVD

Nanotube growth is compatible with superconducting microwave structures

Abstract

The in-place growth of suspended carbon nanotubes facilitates the observation of both unperturbed electronic transport spectra and high-Q vibrational modes. For complex structures integrating, e.g., superconducting rf elements on-chip, selection of a chemically and physically resistant material that survives the chemical vapor deposition (CVD) process provides a challenge. We demonstrate the implementation of molybdenum-rhenium coplanar waveguide resonators that exhibit clear resonant behaviour at cryogenic temperatures even after having been exposed to nanotube growth conditions. The properties of the MoRe devices before and after CVD are compared to a reference niobium device.