Experimental study and simulation of a micro-discharge with limited cathode area

TL;DR

This paper combines experimental measurements and simulations to analyze a helium micro-discharge in a micro cavity device, demonstrating stable abnormal glow operation by limiting cathode area with a dielectric layer.

Contribution

It introduces a method to achieve steady-state abnormal glow in micro-discharges through cathode surface area limitation, supported by both experimental and simulation data.

Findings

Micro-discharge operates in a steady abnormal glow regime.

Limiting cathode area enables stable micro-discharge operation.

Physical properties of the abnormal glow are characterized.

Abstract

We report in this paper simulation results and experimental measurements to characterize a micro-discharge generated in a single micro cavity device operating in helium. By spatially limiting the cathode surface area using a dielectric layer, we demonstrate the ability of the micro-discharge to work in a steady-state abnormal glow regime. The physical properties of this regime are discussed.