Conducting LaAlO3/SrTiO3 heterointerfaces on atomically flat substrates prepared by deionized-water
J. G. Connell, J. Nichols, J. H. Gruenewald, D.-W. Kim, S. S. A. Seo

TL;DR
This study demonstrates that water-leaching can produce atomically flat SrTiO3 substrates suitable for high-quality LaAlO3/SrTiO3 heterostructures, offering a safer alternative to traditional etching methods.
Contribution
The paper introduces a water-leaching method for preparing atomically flat SrTiO3 substrates, enabling high-quality heterostructure growth comparable to conventional methods.
Findings
Water-leaching produces atomically flat SrTiO3 substrates.
LAO/STO heterostructures on water-leached substrates show high structural and transport quality.
Water-leaching is a safer alternative for substrate preparation.
Abstract
We have investigated how the recently-developed water-leaching method for atomically-flat SrTiO3 (STO) substrates affects the transport properties of LaAlO3 (LAO) and STO heterointerfaces. Using pulsed laser deposition at identical growth conditions, we have synthesized epitaxial LAO thin-films on two different STO substrates, which are prepared by water-leaching and buffered hydrofluoric acid (BHF) etching methods. The structural, transport, and optical properties of LAO/STO heterostructures grown on water-leached substrates show the same high-quality as the samples grown on BHF-etched substrates. These results indicate that the water-leaching method can be used to grow complex oxide heterostructures with atomically well-defined heterointerfaces without safety concerns.
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