LiNbO3 ridge waveguides realized by precision dicing on silicon for high efficiency second harmonic generation

TL;DR

This paper reports the fabrication of nonlinear periodically poled LiNbO3 ridge waveguides on silicon using precision dicing, achieving high-efficiency second harmonic generation with simplified manufacturing and robust, tunable properties.

Contribution

It introduces a novel fabrication method using only precision dicing for LiNbO3 waveguides on silicon, eliminating grinding and polishing steps.

Findings

Normalized conversion efficiency of 204%/W

Waveguides show high robustness and temperature tunability

Fabrication process reduces complexity and cost

Abstract

Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are carved with only use of a precision dicing machine without need for grinding or polishing steps. They show efficient second harmonic generation at telecommunication wavelengths with normalized conversion reaching 204%/W in a 15 mm long device. Influence of geometrical non uniformities of waveguides due to fabrication process is asserted. Components characteristics are studied notably their robustness and tunability versus temperature.