Laser-assisted Oxidation of Multi-layer Tungsten Diselenide Nanosheets
Cheng Tan, Yingnan Liu, Harry Chou, Joon-Seok Kim, Di Wu, Deji, Akinwande, keji Lai

TL;DR
This study investigates laser-induced oxidation of multi-layer tungsten diselenide nanosheets, revealing increased conductivity and potential applications in patterning and electrical contacts for transition metal dichalcogenides.
Contribution
It introduces a laser-assisted oxidation method for WSe2 nanosheets and characterizes the resulting conductive oxide structures using advanced microscopy.
Findings
Oxidized WSe2 shows ~100 S/m conductivity.
Laser oxidation forms sub-stoichiometric WO3-x polycrystals.
Potential for patterning conductive features on 2D materials.
Abstract
We report the structural and electrical characterization of tungsten oxides formed by illuminating multi-layer tungsten diselenide (WSe2) nanosheets with an intense laser beam in the ambient environment. A noninvasive microwave impedance microscope (MIM) was used to perform electrical imaging of the samples. The local conductivity ~100 S/m of the oxidized product, measured by the MIM and conventional transport experiments, is much higher than that of the pristine WSe2, suggesting the formation of sub-stoichiometric WO3-x polycrystals with n-type carriers. With further efforts to improve the conductivity of the oxides, the laser-assisted oxidation process may be useful for patterning conductive features on WSe2 or forming electrical contacts to various transition metal dichalcogenides.
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