2D SEM images turn into 3D object models

TL;DR

This paper reviews methods that convert 2D SEM images into 3D models, enhancing microscopic surface analysis through computer vision and geometric algorithms.

Contribution

It provides a comprehensive literature review of automatic 3D surface reconstruction techniques from SEM images, highlighting recent advances.

Findings

Survey of existing 3D reconstruction methods from SEM images

Identification of key algorithms and approaches used

Discussion of challenges and future directions

Abstract

The scanning electron microscopy (SEM) is probably one the most fascinating examination approach that has been used since more than two decades to detailed inspection of micro scale objects. Most of the scanning electron microscopes could only produce 2D images that could not assist operational analysis of microscopic surface properties. Computer vision algorithms combined with very advanced geometry and mathematical approaches turn any SEM into a full 3D measurement device. This work focuses on a methodical literature review for automatic 3D surface reconstruction of scanning electron microscope images.