Heat and Mass Transfer during Chemical Vapor Deposition on the Particle Surface Subjected to Nanosecond Laser Heating

TL;DR

This paper presents an analytical thermal model for chemical vapor deposition of TiN on spherical particles under nanosecond laser heating, considering heat transfer, chemical reactions, and gas-phase mass transfer.

Contribution

It introduces a particle-level model that accounts for laser parameters, particle properties, and chamber conditions, advancing multiscale modeling of laser-assisted CVD.

Findings

Surface temperature increases with laser fluence and pulse width.

Deposition rate is affected by chamber pressure and particle size.

Thermal penetration depth varies with laser parameters.

Abstract

A thermal model of chemical vapor deposition of titanium nitride (TiN) on the spherical particle surface under irradiation by a nanosecond laser pulse is presented in this paper. Heat and mass transfer on a single spherical metal powder particle surface subjected to temporal Gaussian heat flux is investigated analytically. The chemical reaction on the particle surface and the mass transfer in the gas phase are also considered. The surface temperature, thermal penetration depth, and deposited film thickness under different laser fluence, pulse width, initial particle temperature, and particle radius are investigated. The effect of total pressure in the reaction chamber on deposition rate is studied as well. The particle-level model presented in this paper is an important step toward development of multiscale model of LCVI.