New approach to exact extraction of piezoresistance coefficient

TL;DR

This paper introduces an improved method for accurately extracting piezoresistance coefficients by modeling stress matrices and using test structures with different membrane thicknesses, reducing estimation errors.

Contribution

It presents a novel approach that enhances the precision of piezoresistance coefficient extraction by incorporating stress matrix models and multiple membrane thicknesses.

Findings

More credible estimation of piezoresistance coefficients $C6_L$ and $C6_T$

Accurate determination of membrane thicknesses

Reduced errors in coefficient estimation

Abstract

The extension of piezoresistance coefficient extraction method was proposed, for protection from errors in estimation of the thickness of the test structure membrane. This new approach requires finding models of elements of matrix of integrated stresses as functions of the membrane thickness. Additionally, two test structures with different thickness of the membrane have to be used. This improved method gives the more credible estimation of piezoresistance coefficients $\pi_L$ and $\pi_T$ and the thickness of the membranes of the used test structures.