Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique
Claire A. McLellan, Bryan A. Myers, Stephan Kraemer, Kenichi Ohno,, David D. Awschalom, Ania C. Bleszynski Jayich

TL;DR
This paper presents a precise method for creating highly coherent nitrogen-vacancy centers in diamond using focused electron irradiation, enabling advanced quantum sensing and information applications.
Contribution
The authors introduce a novel three-dimensional, patterned NV center formation technique with high coherence times, combining nitrogen doping and electron irradiation.
Findings
NV centers with coherence times over 1 ms
Lateral confinement of vacancies to less than 1 μm
Effective formation of high-quality NV centers inside nanostructures
Abstract
We demonstrate fully three-dimensional and patterned localization of nitrogen-vacancy (NV) centers in diamond with coherence times in excess of 1 ms. Nitrogen {\delta}-doping during CVD diamond growth vertically confines nitrogen to 4 nm while electron irradiation with a transmission electron microscope (TEM) laterally confines vacancies to less than 1 {\mu}m. We characterize the effects of electron energy and dose on NV formation. Importantly, our technique enables the formation of reliably high-quality NV centers inside diamond nanostructures, with applications in quantum information and sensing.
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