High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

TL;DR

This paper discusses advanced drive techniques that significantly improve the response times of MEMS/NEMS devices, enabling broader application potential by achieving faster control of electro-mechanical transduction.

Contribution

It introduces novel high-speed control methods for MEMS micromirrors that enhance response times by up to a thousandfold compared to traditional approaches.

Findings

Response times improved by up to 1000 times

Enhanced application scope for MEMS/NEMS devices

Validated drive techniques for optimized step-and-settle response

Abstract

Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.