Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres
Robert Franz, Francisca Mendez Martin, Gerhard Hawranek, Peter Polcik

TL;DR
This study investigates the erosion behavior of Al-Cr composite cathodes with varying aluminum content in different atmospheres, revealing formation of intermetallic phases and non-uniform poisoning effects in reactive gases.
Contribution
It provides new insights into the erosion mechanisms and surface modifications of Al-Cr cathodes in inert and reactive atmospheres, including formation of intermetallics and effects of magnetic field configuration.
Findings
Intermetallic Al-Cr phases form in heat-affected zones.
Reactive layers are absent in the erosion zone except for oxide islands.
Poisoning effects are non-uniform due to magnetic field influence.
Abstract
AlCr composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N and O atmospheres and their erosion behaviour was studied. Cross-sectional analysis of the elemental distribution of the near-surface zone in the cathodes by scanning electron microscopy revealed the formation of a modified layer for all cathodes and atmospheres. Due to intermixing of Al and Cr in the heat-affected zone, intermetallic Al-Cr phases formed as evidenced by X-ray diffraction analysis. Cathode poisoning effects in the reactive N and O atmospheres were non-uniform as a result of the applied magnetic field configuration. With the exception of oxide islands on Al-rich cathodes, reactive layers were absent in the circular erosion zone, while nitrides and oxides formed in the less eroded centre region of the cathodes.
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