Construction and Characterization of a Frequency-Controlled, Picometer-Resolution, Displacement Encoder-Actuator

TL;DR

This paper presents a compact, digitally-controlled displacement encoder-actuator with picometer resolution, utilizing microwave cavity resonance frequency control, suitable for high-precision scanning microscopy.

Contribution

It introduces a novel frequency-controlled actuator/encoder with picometer resolution, advancing precision in displacement measurement and control.

Findings

Achieved picometer-level displacement resolution.

Demonstrated suitability for metrologic-precision microscopy.

Developed a compact, digitally-controlled device.

Abstract

We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-micrometer-range, digitally-controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.