Capacitive displacement method to determine the longitudinal piezoelectric coefficients of single crystals, ceramics and thin films

TL;DR

This paper presents a capacitive displacement method for accurately measuring the longitudinal piezoelectric coefficients of various piezoelectric materials, including bulk and thin films, with high precision suitable for smart device integration.

Contribution

It introduces a simple, reliable technique for measuring piezoelectric coefficients with picometer-level displacement detection, advancing characterization methods for piezoelectric materials.

Findings

Capacitive displacement method accurately measures piezoelectric coefficients.

Displacement detection sensitivity reaches 2 pm.

Applicable to both bulk and thin film piezoelectric materials.

Abstract

Recent developments in piezoelectric films have heightened the need for the reliable methods to correctly characterize their piezoelectric coefficients. Here, we demonstrate that capacitive displacement method can be used to determine longitudinal piezoelectric coefficients in both bulk and thin film of piezoelectric materials reliably and simply. Our technique allows accurate detection of elastic displacement at a level of 2 pm. This achievement is of great interest and significance for the development of piezoelectric integration technology in modern smartdevices.