Production yield of rare-earth ions implanted into an optical crystal
Thomas Kornher, Kangwei Xia, Roman Kolesov, Nadezhda Kukharchyk, Rolf, Reuter, Petr Siyushev, Rainer St\"ohr, Matthias Schreck, Hans-Werner Becker,, Bruno Villa, Andreas D. Wieck, J\"org Wrachtrup

TL;DR
This study investigates the production yield of cerium and praseodymium ions implanted into optical crystals, demonstrating high yields through tailored annealing, which is promising for quantum photonic device fabrication.
Contribution
It provides the first quantitative analysis of rare-earth ion implantation yields into optical crystals for quantum applications.
Findings
Cerium yield up to 53% with tailored annealing.
Praseodymium yield up to 91%.
Implantation yields measured via fluorescence intensity.
Abstract
Rare-earth ions doped into desired locations of optical crystals might enable a range of novel integrated photonic devices for quantum applications. With this aim, we have investigated the production yield of cerium and praseodymium by means of ion implantation. As a measure, the collected fluorescence intensity from both, implanted samples and single centers was used. With a tailored annealing procedure for cerium, a yield up to 53% was estimated. Praseodymium yield amounts up to 91%.
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