Large-area epitaxial growth of MoSe2 via an incandescent molybdenum source

TL;DR

This paper introduces a novel incandescent molybdenum source for the large-area epitaxial growth of single-crystalline MoSe2 thin films, demonstrating high-quality monolayers with potential for broader 2D material synthesis.

Contribution

The study presents a new incandescent Mo source method enabling large-area epitaxial growth of high-quality MoSe2 monolayers, surpassing conventional techniques.

Findings

Successful growth of large-area single-crystalline MoSe2 monolayers.

Identification of a new Raman peak at 1591 cm-1.

Consistent characterization confirming high-quality epitaxial films.

Abstract

We have developed an incandescent Mo source to fabricate large-area single-crystalline MoSe2 thin films. The as-grown MoSe2 thin films were characterized using transmission electron microscopy, energy dispersive X-ray spectroscopy, atomic force microscopy, Raman spectroscopy, photoluminescence, reflection high energy electron diffraction (RHEED) and angular resolved photoemission spectroscopy (ARPES). A new Raman characteristic peak at 1591 cm-1 was identified. Results from Raman spectroscopy, photoluminescence, RHEED and ARPES studies consistently reveal that large-area single crystalline mono-layer of MoSe2 could be achieved by this technique. This technique enjoys several advantages over conventional approaches and could be extended to the growth of other two-dimensional layered materials containing a low-vapor-pressure element.