Planar multilayer circuit quantum electrodynamics
Z.K. Minev, K. Serniak, I.M. Pop, Z. Leghtas, K. Sliwa, M. Hatridge,, L. Frunzio, R. J. Schoelkopf, M. H. Devoret

TL;DR
This paper introduces a multilayer superconducting circuit design that combines 2D and 3D quantum electrodynamics advantages, using standard fabrication techniques and a vacuum gap for energy storage.
Contribution
It presents a novel multilayer superconducting circuit architecture integrating 2D and 3D elements with standard fabrication methods.
Findings
Successful implementation of a multilayer circuit with integrated cavity modes and transmon qubit.
Demonstration of the aperture concept for planar qubit integration.
Potential for scalable quantum information processing architectures.
Abstract
Experimental quantum information processing with superconducting circuits is rapidly advancing, driven by innovation in two classes of devices, one involving planar micro-fabricated (2D) resonators, and the other involving machined three-dimensional (3D) cavities. We demonstrate that circuit quantum electrodynamics can be implemented in a multilayer superconducting structure that combines 2D and 3D advantages. We employ standard micro-fabrication techniques to pattern each layer, and rely on a vacuum gap between the layers to store the electromagnetic energy. Planar qubits are lithographically defined as an aperture in a conducting boundary of the resonators. We demonstrate the aperture concept by implementing an integrated, two cavity-modes, one transmon-qubit system.
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