Surface States Engineering of Metal/MoS2 Contacts Using Sulfur Treatment for Reduced Contact Resistance and Variability
Shubhadeep Bhattacharjee, Kolla Lakshmi Ganapathi, Digbijoy N. Nath, and Navakanta Bhat

TL;DR
This study demonstrates that sulfur treatment of MoS2 surfaces reduces contact resistance and variability by engineering surface states, leading to improved device performance without structural changes.
Contribution
It is the first to show surface states engineering via sulfur treatment effectively reduces Schottky barrier height and contact variability in MoS2 devices.
Findings
Significant reduction in Schottky barrier height for Ni and Pd contacts.
Enhanced Ohmic contact behavior and increased mobility.
No structural or doping changes detected post-treatment.
Abstract
Variability and lack of control in the nature of contacts between metal/MoS2 interface is a major bottleneck in the realisation of high-performance devices based on layered materials for several applications. In this letter, we report on the reduction in Schottky barrier height at metal/MoS2 interface by engineering the surface states through sulphur treatment. Electrical characteristics for back-gated MoS2 field effect transistor structures were investigated for two high work-function metal contacts Ni and Pd. Contacts on MoS2 treated with sulphur exhibited significant improvements in Ohmic nature with concomitant reduction in variability compared to those on untreated MoS2 films leading to a 2x increase in extracted mobility. X-ray Photoelectron Spectroscopy (XPS) measurements, Raman Spectroscopy and comparison of threshold voltages indicated absence of additional doping or structural…
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