Bottom-up fabrication of highly ordered metal nanostructures by hierarchical self-assembly
Denise Erb, Kai Schlage, Ralf R\"ohlsberger

TL;DR
This paper presents a hierarchical self-assembly method for fabricating highly ordered metal nanostructures over large areas, offering a lithography-free alternative with high precision and potential for various advanced applications.
Contribution
It introduces a novel self-assembly process combining surface reconstruction, copolymer phase separation, and metal diffusion to create uniform nanostructures at a large scale.
Findings
Achieved highly regular metal nanostructure arrays covering square centimeters.
Demonstrated in-situ GISAXS to monitor nanostructure formation and order.
Showed potential for customizing nanostructure morphology and large-area patterning.
Abstract
In a hierarchical nanopatterning routine relying exclusively on self-assembly processes we combine crystal surface reconstruction, microphase separation of copolymers, and selective metal diffusion to produce monodisperse metal nanostructures in highly regular arrays covering areas of square centimeters. In-situ GISAXS during Fe nanostructure formation evidences the outstanding structural order in the self-assembling system and hints at possibilities of sculpting nanostructures by external process parameters. Thus, we demonstrate that nanopatterning via self-assembly is a competitive alternative to lithography-based routines, achieving comparable pattern regularity, feature size, and patterned areas with considerably reduced effort. The option for in-situ investigations during pattern formation, the possibility of customizing the nanostructure morphology, the capacity to pattern…
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